Abstract
ISO 29301:2017 specifies a calibration procedure applicable to images recorded over a wide magnification range in a transmission electron microscope (TEM). The reference materials used for calibration possess a periodic structure, such as a diffraction grating replica, a super-lattice structure of semiconductor or an analysing crystal for X-ray analysis, and a crystal lattice image of carbon, gold or silicon. This document is applicable to the magnification of the TEM image recorded on a photographic film, or an imaging plate, or detected by an image sensor built into a digital camera. This document also refers to the calibration of a scale bar. This document does not apply to the dedicated critical dimension measurement TEM (CD-TEM) and the scanning transmission electron microscope (STEM).
General information
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Status: WithdrawnPublication date: 2017-12Stage: Withdrawal of International Standard [95.99]
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Edition: 2Number of pages: 44
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Technical Committee :ISO/TC 202/SC 3ICS :37.020
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Life cycle
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Previously
WithdrawnISO 29301:2010
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Now
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Revised by
PublishedISO 29301:2023
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