Reference number
ISO 29301:2010
© ISO 2024
ISO 29301:2010
Microbeam analysis — Analytical transmission electron microscopy — Methods for calibrating image magnification by using reference materials having periodic structures
Edition 1
2010-06
Withdrawn
Withdrawn (Edition 1, 2010)

Abstract

ISO 29301:2010 specifies a calibration procedure applicable to images recorded over a wide magnification range in a transmission electron microscope (TEM). The reference materials used for calibration possess a periodic structure, such as a diffraction grating replica, a super-lattice structure of semiconductor or an analysing crystal for X-ray analysis, and a crystal lattice image of carbon, gold or silicon. ISO 29301:2010 is applicable to the magnification of the TEM image recorded on a photographic film, or an imaging plate, or detected by an image sensor built into a digital camera. ISO 29301:2010 also refers to the calibration of a scale bar. ISO 29301:2010 does not apply to the dedicated critical dimension measurement TEM (CD-TEM) and the scanning transmission electron microscope (STEM)

General information

  • Status
     : Withdrawn
    Publication date
     : 2010-06
    Stage
    : Withdrawal of International Standard [95.99]
  • Edition
     : 1
    Number of pages
     : 40
  • Technical Committee :
    ISO/TC 202/SC 3
    ICS :
    37.020 
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