ISO 20146:2019

Published (Edition 1, 2019)

ISO 20146:2019

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Abstract

This document defines terms related to capacitance diaphragm gauges (CDGs), specifies which parameters have to be given for CDGs, details their calibration procedure and describes which measurement uncertainties have to be considered when operating these gauges.

This document complements ISO 3567 and ISO 27893 when calibrating CDGs and using them as reference standards.

General information

Status
: Published

Publication date
: 2019-01

Stage
: International Standard under systematic review [90.20]
Edition
: 1

Number of pages
: 16
Technical Committee :
ISO/TC 112

ICS :
23.160
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