Abstract
The considered pumps discharge the gas against atmosphere pressure and achieve a limiting inlet pressure of less than 100 Pa in one stage. The method adopted is that the ultimate pressure is measured at a specified temperature in a specified form of test dome attached to the inlet of the pump.
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Status: WithdrawnPublication date: 1989-10
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Edition: 2Number of pages: 3
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- ICS :
- 23.160 Vacuum technology
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