Abstract
This International Standard specifies a format to supplement ISO 14976 to transfer data for the creation, expansion
and revision of a surface chemical analysis spectral database. The format is applied to Auger electron
spectroscopy (AES) and X-ray photoelectron spectroscopy (XPS) spectral data.
General information
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Status: PublishedPublication date: 2000-12Stage: International Standard confirmed [90.93]
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Edition: 1Number of pages: 17
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Technical Committee :ISO/TC 201/SC 3
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