ISO 5302:2003
Vacuum technology — Turbomolecular pumps — Measurement of performance characteristics
Reference number
ISO 5302:2003
Edition 1
2003-07
© ISO 2024
Withdrawn
Withdrawn (Edition 1, 2003)

Abstract

ISO 5302:2003 specifies methods for the measurements of performance characteristics of turbomolecular pumps. It is applicable to all sizes and all types of turbomolecular pumps, with mechanical or magnetic bearings, and with or without an additional drag stage.

General information

  • Status
     : Withdrawn
    Publication date
     : 2003-07
    Stage
    : Withdrawal of International Standard [95.99]
  • Edition
     : 1
    Number of pages
     : 14
  • Technical Committee :
    ISO/TC 112
    ICS :
    23.160 
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