ISO 14644-12:2018
p
ISO 14644-12:2018
69432
недоступно на русском языке

Тезис

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This document covers the monitoring of air cleanliness by particles in terms of concentration of airborne nanoscale particles.

For monitoring purposes, only populations of particles with a lower size limit of 0.1 microns (100 nm) or less ? "nanoscale" ? are considered.

The monitoring given in this document is for use mainly in "operational" states.

NOTE 1 For the purposes of this document, reference is made to "nanoscale particles", which means all nano-objects having one (nanoplate), two (nanofibre) or three (nanoparticle) dimensions in the nanoscale.

NOTE 2 As a consequence, the specifications for monitoring air cleanliness by nanoscale particle concentration of the cleanroom in operational state also considers process specifics, e.g., used equipment, personnel behaviour, etc.

NOTE 3 Health and safety considerations are excluded from this document.


Общая информация 

  •  : Опубликовано
     : 2018-08
  •  : 1
  •  : ISO/TC 209 Cleanrooms and associated controlled environments
  •  :
    13.040.35 Cleanrooms and associated controlled environments

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ru
Формат Язык
std 1 61 PDF + ePub
std 2 61 Бумажный
  • CHF61

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