ISO 16700:2004
Microbeam analysis — Scanning electron microscopy — Guidelines for calibrating image magnification
Reference number
ISO 16700:2004
Edición 1
2004-03
© ISO 2024
Retirada
Retirada (Edición 1, 2004)

Resumen

ISO 16700:2004 specifies a method for calibrating the magnification of images generated by a scanning electron microscope (SEM) using an appropriate reference material. This method is limited to magnifications determined by the available size range of structures in the calibrating reference material. This International Standard does not apply to the dedicated critical dimension measurement SEM.

Informaciones generales

  • Estado
     : Retirada
    Fecha de publicación
     : 2004-03
    Etapa
    : Retirada de la Norma Internacional [95.99]
  • Edición
     : 1
    Número de páginas
     : 16
  • Comité Técnico :
    ISO/TC 202/SC 4
    ICS :
    37.020 
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